Mechanical and viscoelastic properties of materials by instrumented indentation.
The mechanical properties of small volumes of material have received increasing attention in the past decade due to the extensive use of films and coatings in microelectronic devices and as protection against wear and corrosion. The mechanical properties of thin films of a given material are often s...
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| Language: | en |
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The University of Arizona.
1995
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| Online Access: | http://hdl.handle.net/10150/187224 |