An Electrical-Stimulus-Only BIST IC For Capacitive MEMS Accelerometer Sensitivity Characterization
abstract: Testing and calibration constitute a significant part of the overall manufacturing cost of microelectromechanical system (MEMS) devices. Developing a low-cost testing and calibration scheme applicable at the user side that ensures the continuous reliability and accuracy is a crucial need....
Other Authors: | Ozel, Muhlis Kenan (Author) |
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Format: | Doctoral Thesis |
Language: | English |
Published: |
2017
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Subjects: | |
Online Access: | http://hdl.handle.net/2286/R.I.46194 |
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