Inductively coupled Ar/Clâ‚‚ plasma etching of GaN

Bibliographic Details
Main Author:	Rizvi, Syed Shabbar Abbas
Published:	University of Ulster 2003
Subjects:	621.381531 Optical emission spectroscopy
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.288895

id	ndltd-bl.uk-oai-ethos.bl.uk-288895
record_format	oai_dc
spelling	ndltd-bl.uk-oai-ethos.bl.uk-2888952015-03-19T08:14:36ZInductively coupled Ar/Clâ‚‚ plasma etching of GaNRizvi, Syed Shabbar Abbas2003621.381531Optical emission spectroscopyUniversity of Ulsterhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.288895Electronic Thesis or Dissertation
collection	NDLTD
sources	NDLTD
topic	621.381531 Optical emission spectroscopy
spellingShingle	621.381531 Optical emission spectroscopy Rizvi, Syed Shabbar Abbas Inductively coupled Ar/Clâ‚‚ plasma etching of GaN
author	Rizvi, Syed Shabbar Abbas
author_facet	Rizvi, Syed Shabbar Abbas
author_sort	Rizvi, Syed Shabbar Abbas
title	Inductively coupled Ar/Clâ‚‚ plasma etching of GaN
title_short	Inductively coupled Ar/Clâ‚‚ plasma etching of GaN
title_full	Inductively coupled Ar/Clâ‚‚ plasma etching of GaN
title_fullStr	Inductively coupled Ar/Clâ‚‚ plasma etching of GaN
title_full_unstemmed	Inductively coupled Ar/Clâ‚‚ plasma etching of GaN
title_sort	inductively coupled ar/clâ‚‚ plasma etching of gan
publisher	University of Ulster
publishDate	2003
url	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.288895
work_keys_str_mv	AT rizvisyedshabbarabbas inductivelycoupledarclaplasmaetchingofgan
_version_	1716761393184636928

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