Inductively coupled Ar/Clâ‚‚ plasma etching of GaN

Inductively coupled Ar/Clâ‚‚ plasma etching of GaN

Bibliographic Details
Main Author:	Rizvi, Syed Shabbar Abbas
Published:	University of Ulster 2003
Subjects:	621.381531 Optical emission spectroscopy
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.288895

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