Fundamental studies of the PVD technique

A study and comparison of two commercially available and competitive physical vapour deposition techniques has been made. Titanium nitride (the most widely used hard and decorative coating) has been deposited by both steered arc and the new Arc Bond Sputter (ABS) magnetron technique under a range of...

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Bibliographic Details
Main Author: Ives, Malcolm
Published: Sheffield Hallam University 1994
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.387143