Microactuators and their application in micro-opto-electro-mechanical systems (MOEMS)
Microactuators are active elements for microelectromechanical systems (MEMS), and are used to provide force to move the MEMS device in the way required. Therefore, their force characteristics, displacement capabilities and velocity ranges are of importance, and require to be investigated. Scratch dr...
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University of Strathclyde
2004
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.401402 |