3 Dimensional proton beam writing for micro electromechanical systems applications
Proton beam writing is a direct write lithographic technique that uses finely focused MeV proton beams to create structures in a target material. The depth the protons travel in a material is dependent on its energy, this unique property of proton beams allow multi level structures to be created in...
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University of Surrey
2009
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.510586 |