Sensitivity enhancement in micro-electromechanical systems for sensor applications
Micro-mechanical sensors are typically fabricated both in large numbers and economically using the photolithographic processes that were originally developed in the integrated circuit industry. The magnitude of a change in resonant frequency of a micro-me chanical structure can be used to quantify a...
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University of Oxford
2010
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.533889 |