Fabrication of ferroelectrics based MEMS structures for electronically switchable bulk acoustic wave resonators
The thesis describes the research carried out into fabrication of multilayer microwave capacitance structure with ferroelectric films in paraelectric state; and confirmation of the possibility to develop on their base an electronically switchable bulk acoustic wave (BAW) resonator. Different eigenmo...
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Imperial College London
2014
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.656571 |