STUDIES ON THE FABRICATION OF VERTICAL INTEGRATED MEMS DEVICES
Kyoto University (京都大学) === 0048 === 新制・論文博士 === 博士(工学) === 乙第12493号 === 論工博第4047号 === 新制||工||1503(附属図書館) === 28243 === (主査)教授 平尾 一之, 教授 横尾 俊信, 教授 田中 勝久 === 学位規則第4条第2項該当
Main Author: | Oba, Masatoshi |
---|---|
Other Authors: | 平尾, 一之 |
Format: | Others |
Language: | English |
Published: |
京都大学 (Kyoto University)
2010
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Subjects: | |
Online Access: | http://hdl.handle.net/2433/126817 |
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