Radical Kinetics and Its Control in Chemical Vapor Deposition of Amorphous, Microcrystalline and Polycrystalline Silicon Thin Films
Kyoto University (京都大学) === 0048 === 新制・論文博士 === 博士(工学) === 乙第9750号 === 論工博第3291号 === 新制||工||1098(附属図書館) === UT51-98-C204 === (主査)教授 橘 邦英, 教授 松波 弘之, 教授 橋本 健治 === 学位規則第4条第2項該当
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| Format: | Others |
| Language: | English |
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Kyoto University
2008
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| Online Access: | http://hdl.handle.net/2433/59314 |