Surface Chemical Deposition of Advanced Electronic Materials

The focus of this work was to examine the direct plating of Cu on Ru diffusion barriers for use in interconnect technology and the substrate mediated growth of graphene on boron nitride for use in advanced electronic applications. The electrodeposition of Cu on Ru(0001) and polycrystalline substrate...

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Bibliographic Details
Main Author: Bjelkevig, Cameron
Other Authors: Kelber, Jeffery A.
Format: Others
Language:English
Published: University of North Texas 2010
Subjects:
CVD
Online Access:https://digital.library.unt.edu/ark:/67531/metadc67938/