Chemical bonding in hard and elastic amorphous carbon-nitride films
In this study, the chemical bonding in hard and elastic amorphous carbon nitride (a-CNx) films is investigated with x-ray photoelectron spectroscopy (XPS) and 15N, 13C, and 1H nuclear magnetic resonance (NMR) spectroscopy. The films were deposited by DC Magnetron sputtering in a pure nitrogen discha...
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| Format: | Others |
| Language: | English |
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W&M ScholarWorks
2003
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| Online Access: | https://scholarworks.wm.edu/etd/1539623423 https://scholarworks.wm.edu/cgi/viewcontent.cgi?article=3214&context=etd |