Homogeneous substrate heating using a CO<sub>2</sub> laser with feedback, rastering, and temperature monitoring
We report results from a highly versatile and scalable raster-scanned continuous wave CO<sub>2</sub> laser heater incorporating a dual wavelength photodiode-based temperature monitoring system with feedback control. The system is able to uniformly heat substrates inside a vacuum chamber,...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2000.
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| Subjects: | |
| Online Access: | Get fulltext |