Atomic-scale defects 1 Defect study 1 Defects 1 Depth dependents 1 Electrons 1 Energy 1 Films 1 Metal dielectrics 1 Metal semiconductors 1 Nondestructive characterization 1 Nondestructive examination 1 Particle beams 1 Positron annihilation 1 Positron annihilation spectroscopy 1 Positron-beams 1 Pulsed positron beams Single-atoms 1