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BASIC SEMICONDUCTOR PROCESSING LAB
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BASIC SEMICONDUCTOR PROCESSING LAB
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Nanomembrane-based hybrid
semiconductor
-superconductor heterostructures
by
Thurmer, Dominic J.
Published 2011
“
...The combination of modern self-assembly techniques with well-established top-down
processing
...
”
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Doctoral Thesis
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TU Chemnitz, Fakultät für Naturwissenschaften
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Thurmer, Dominic J.
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