Showing 1 - 20 results of 46 for search 'CHEMICAL PROCESS CONTROL', query time: 1.18s Refine Results
  1. 1
  2. 2
  3. 3
  4. 4
    by Sorooshian, Jamshid
    Published 2005
    ..., temperature and kinematics on inter-level dielectric (ILD) and metal chemical mechanical planarization (CMP...
    Get full text
  5. 5
  6. 6
    by Moore-Nall, Anita Louise
    Published 2017
    .... Structural data support fracturing accompanied by tectonic hydrothermal brecciation as a process...
    Get full text
  7. 7
    by Mushonga, Sylvester Paul
    Published 2015
    Subjects: ...Engineering|Chemical engineering...
    Get full text
  8. 8
    by Bakhurji, Khalid A.
    Published 2015
    Subjects: ...Chemical engineering|Electrical engineering...
    Get full text
  9. 9
    by Choo, Youngwoo
    Published 2019
    Subjects: ...Chemical engineering|Nanotechnology|Materials science...
    Get full text
  10. 10
    by Muthukumaran, Ashok Kumar
    Published 2008
    .... Development of a full sequence ECMP process would require the removal of the barrier layer as well. Chemical...
    Get full text
  11. 11
  12. 12
  13. 13
    by Missi, Charles
    Published 2019
    ... the hydrogeochemical processes that control water quality. Groundwater in the Lake Chilwa Basin are highly saline which...
    Get full text
  14. 14
    by Rosales-Yeomans, Daniel
    Published 2007
    ... 100-mm) polisher during ILD CMP. Results showed that scaling the ILD process from 100 to 200 mm caused...
    Get full text
  15. 15
    by Beheshtaein, Setareh
    Published 2016
    Subjects: ...Chemical engineering|Environmental engineering...
    Get full text
  16. 16
  17. 17
  18. 18
    by Tobin, Peter H.
    Published 2015
    Subjects: ...Biochemistry|Chemical engineering|Biophysics...
    Get full text
  19. 19
  20. 20
    by Zhu, Hongbin
    Published 2005
    ...The current semiconductor device manufacturing requires more strict control of plasma etching...
    Get full text