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82“... submicron manufacturing processes. It is known that chemical mechanical planarization (CMP) is a direct...”
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83“... will be built and used to control the chemical coagulation and sedimentation process. ...”
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84“... frequently used process control strategies. The principle of MPC is to have a process model, which is able...”
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85“... chemical mechanical polishing processes. In this new process control scheme, the least-squared method...”
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86“...碩士 === 東海大學 === 工業工程與經營資訊學系 === 92 === SPC (Statistical Process Control) is the earliest...”
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87“...碩士 === 國立交通大學 === 機械工程系所 === 95 === Chemical-Mechanical Polish is an extremely complicated process...”
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98by Reeves, Deborah EdwardsSubjects: “...Chemical process control...”
Published 2006
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100by Fedor V. Vasilyev, Arkadiy M. Medvedev, Fedor A. Barakovsky, Maksim A. KorobkovSubjects: “...chemical manufacturing processes...”
Published 2021-07-01
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