Morphology Surface morphology 3 Scanning electron microscopy 2 Semiconductor materials 2 Amorphous carbon 1 Annealing temperatures 1 Applied bias voltage 1 Aspect ratio 1 Biological structure carbon 1 Biological structures 1 Boron doped 1 Boron-doped 1 Calcination 1 Calcination method 1 Carbon carbon composites 1 Carbon films 1 Charge transfer 1 Chemical vapor deposition 1 Chemical vapor depositions (CVD) 1 Chemical-etching process 1 Chlorine compounds 1 Cobalt compounds 1 Combustion method 1 Crystalline phase 1 Crystallites 1 Crystallized particles 1 Decomposition 1 Electronic materials 1 Electrophysical properties 1 Etching 1