Showing 1 - 4 results of 4 for search 'GAS TRANSMISSION AND DISTRIBUTION', query time: 0.87s Refine Results
  1. 1
    Transport and distribution of gaseous impurities in UHP gas delivery systems and process equipment.
    by Verma, Nishith K.
    Published 1995
    “... tool, with an emphasis on ascertaining impurity distribution in a vertical diffusion furnace. The major...”
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  2. 2
    Comprehensive Methods for Contamination Control in UHP Fluids
    by Jhothiraman, Jivaan Kishore
    Published 2016
    Subjects: “...Ultra high pure gas distribution...”
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  3. 3
    Reducing Ultra-High-Purity (UHP) Gas Consumption by Characterization of Trace Contaminant Kinetic and Transport Behavior in UHP Fabrication Environments
    by Dittler, Roy Frank
    Published 2014
    Subjects: “...Ultra-pure Gas Systems...”
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  4. 4
    Interaction of Molecular Contaminants with Low-k Dielectric Films and Metal Surfaces
    by Iqbal, Asad
    Published 2007
    “... under typical manufacturing conditions. Transmission Electron Microscope (TEM) studies showed...”
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