Thin films III-V semiconductors 3 Oxide films 3 Zinc oxide 3 Alumina 2 Aluminum nitride 2 Aluminum oxide 2 Chemical vapor deposition 2 Current-voltage measurements 2 II-VI semiconductors 2 Infrared devices 2 Optical properties 2 Scanning electron microscopy 2 Semiconductor doping 2 Silicon 2 Substrates 2 Thin-films 2 Titanium dioxide 2 X ray diffraction 2 Acetone 1 Acoustic surface wave filters 1 Acoustic waves 1 Al doped ZnO 1 Al-doped ZnO 1 Aluminum 1 Aluminum coatings 1 Aluminum-doped zinc oxide thin films 1 Amorphous carbon 1 Amorphous carbon thin films 1 Amorphous silicon 1