“... components using 3D-IC technologies. Because of THz wavelength between 10μm and 1000μm, the order of optical...”
Get full text

“..., but the fabrication process becomes more efficient and less time consuming. Among the technologies of 3D IC...”
Get full text

“... are approaching the physical limits, the semiconductor industry urgently requires some new technologies to expand...”
Get full text

“... in development of temporary bonding and permanent bonding for bonding technology in 3D integration. Due...”
Get full text

“... (Monolithic 3D-IC) is one of the key research in the development of the semiconductor industry. The distance...”
Get full text

“... integrated circuits (3D IC). It has high material selectivity and high semiconductor process compatibility...”
Get full text

“..., the bonding technology is the key process of 3D ICs fabrication. By the bonding technology, the connection...”
Get full text

“... of the promising approach in keeping up with Moore’s law in the semiconductor field. Some of the key technologies...”
Get full text

“.... In this research, the ultra-high-resolution demand is satisfied with the silicon semiconductor standard process...”
Get full text

“... in semiconductor industry with low resistivity and high electro-migration resistance, has been developed for 3D...”
Get full text