Search Results - SEMICONDUCTOR PROCESS TECHNOLOGY

1

The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

by Yan Su, Pengfei Xu, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang
Published 2020-02-01

“... on the characteristics and locking process of nonlinear MEMS gyroscopes is reported. We solved the dynamic equation using...”

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2

Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching

by Jing Ma, Yongqiang Zhao, Wen Liu, Peishuai Song, Liangliang Yang, Jiangtao Wei, Fuhua Yang, Xiaodong Wang
Published 2021-01-01

“... such as increasing photon absorption. The fabrication process on GaAs substrate was rarely reported, and most...”

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3

A Novel Nanocone Cluster Microstructure with Anti-reflection and Superhydrophobic Properties for Photovoltaic Devices

by Jing Ma, Yuanfei Ai, Lei Kang, Wen Liu, Zhe Ma, Peishuai Song, Yongqiang Zhao, Fuhua Yang, Xiaodong Wang
Published 2018-10-01

“... process of traditional 3D nanostructures restricted its development greatly. In this paper, a new type...”

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4

Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices

by Zhe Ma, Yang Liu, Lingxiao Deng, Mingliang Zhang, Shuyuan Zhang, Jing Ma, Peishuai Song, Qing Liu, An Ji, Fuhua Yang, Xiaodong Wang
Published 2018-01-01

“... process of nanoscale silicon thermoelectric devices. Low-dimensional structures such as silicon nanowire...”

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5

The Recent Progress of MEMS/NEMS Resonators

by Lei Wei, Xuebao Kuai, Yidi Bao, Jiangtao Wei, Liangliang Yang, Peishuai Song, Mingliang Zhang, Fuhua Yang, Xiaodong Wang
Published 2021-06-01

“.... The resonance performance, new test method, and manufacturing process of single or double-clamped resonators...”

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6

Electron transport characteristics of silicon nanowires by metal-assisted chemical etching

by Yangyang Qi, Zhen Wang, Mingliang Zhang, Xiaodong Wang, An Ji, Fuhua Yang
Published 2014-02-01

“... on the contact and the electron transport. A metal-semiconductor-metal model and a thermionic field emission...”

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7

Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes

by Zuo Feng, Yuming He, Wei Yan, Fuhua Yang, Weihua Han, Zhaofeng Li
Published 2020-10-01

“..., and magnesium fluoride WRRs, are also reviewed. The manufacturing process, Q, and integration density values...”

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8

Recent Progress of Miniature MEMS Pressure Sensors

by Peishuai Song, Zhe Ma, Jing Ma, Liangliang Yang, Jiangtao Wei, Yongmei Zhao, Mingliang Zhang, Fuhua Yang, Xiaodong Wang
Published 2020-01-01

“.... Secondly, the miniaturization with the development of the semiconductor processing technology is discussed...”

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9

Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching

by Lihao Wang, Meijie Liu, Junyuan Zhao, Jicong Zhao, Yinfang Zhu, Jinling Yang, Fuhua Yang
Published 2020-06-01

“...This work reports a batch fabrication process for silicon nanometer tip based on isotropic...”

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