Alumina Aluminum oxide 2 Thin films 2 Thin-films 2 Aluminum nitride 1 Aspect ratio 1 Atomic layer deposition 1 Atomic layer etching 1 Atomic-layer deposition 1 Atoms 1 BN films 1 Boron nitride 1 Boron nitride films 1 Chemical vapor deposition 1 Chemical vapor deposition process 1 Chemical vapour deposition 1 Crystalline films 1 Diffractograms 1 Etch rates 1 Etching 1 Etching process 1 Fluorine compounds 1 Fourier transform infrared spectroscopy 1 Hafnium oxides 1 III-V semiconductors 1 In-Situ Study 1 Nitrides 1 Oxide films 1 Photoelectrons 1 Photons 1