Search Results - Anil Thilsted
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Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity by Sanjeev Vishal Kota, Anil Thilsted, Daniel Trimarco, Jesper Yue Pan, Ole Hansen, Jörg Hübner, Rafael Taboryski, Henri Jansen
Published in Micromachines (2025-01-01)Get full text
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