Search Results - Beno Widrig
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Silicon etch with chromium ions generated by a filtered or non-filtered cathodic arc discharge by Daniele Scopece, Max Döbeli, Daniele Passerone, Xavier Maeder, Antonia Neels, Beno Widrig, Alex Dommann, Ulrich Müller, Jürgen Ramm
Published in Science and Technology of Advanced Materials (2016-01-01)Get full text
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