Search Results - DeGui Sun
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Investigation for the structural stress of SiO2 thin films and its distribution on the large-wafer created by plasma enhanced chemical vapor deposition by DeGui Sun, Qingyu Sun, Wenchao Xing, Zheyu Sun, Hongpeng Shang, Liyuan Chang, Xueping Wang, Peng Liu, Trevor Hall
Published in AIP Advances (2018-08-01)Get full text
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