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Liang-Cheng Tu
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An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer
by
Xiaoxiao Song
,
Huafeng Liu
,
Yanyan Fang
,
Chun Zhao
,
Ziqiang Qu
,
Qiu Wang
,
Liang-Cheng Tu
Published in
Sensors
(2020-06-01)
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