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Mihail Andronic
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Self-Controlled Cleaving Method for Silicon DRIE Process Cross-Section Characterization
by
Dmitry A. Baklykov
,
Mihail Andronic
,
Olga S. Sorokina
,
Sergey S. Avdeev
,
Kirill A. Buzaverov
,
Ilya A. Ryzhikov
,
Ilya A. Rodionov
Published in
Micromachines
(2021-05-01)
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