Search Results - Stephan Beurthey

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    Short-Pulse Laser-Assisted Fabrication of a Si-SiO<sub>2</sub> Microcooling Device by Alexandros Mouskeftaras, Stephan Beurthey, Julien Cogan, Gregory Hallewell, Olivier Leroy, David Grojo, Mathieu Perrin-Terrin

    Published in Micromachines (2021-08-01)
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    Comparison of Anodic and Au-Au Thermocompression Si-Wafer Bonding Methods for High-Pressure Microcooling Devices by Sylwester Bargiel, Julien Cogan, Samuel Queste, Stefania Oliveri, Ludovic Gauthier-Manuel, Marina Raschetti, Olivier Leroy, Stéphan Beurthey, Mathieu Perrin-Terrin

    Published in Micromachines (2023-06-01)
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