Search Results - Woobeen Lee
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A unified global model accompanied with a voltage and current sensor for low-pressure capacitively coupled RF discharge by Inho Seong, Sijun Kim, Woobeen Lee, Youngseok Lee, Chulhee Cho, Wonnyoung Jeong, Minsu Choi, Byeongyeop Choi, Huichan Seo, Sangheon Song, Shinjae You
Published in Applied Physics Express (2024-01-01)Get full text
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