Design, Fabrication, and Characterization of a High Q Silica Nanobeam Cavity With Orthogonal Resonant Modes

• الحاوية / القاعدة: IEEE Photonics Journal
• المؤلفون الرئيسيون: Tomohiro Tetsumoto, Hajime Kumazaki, Kentaro Furusawa, Norihiko Sekine, Takasumi Tanabe
• التنسيق: مقال
• اللغة: الإنجليزية
• منشور في: IEEE 2017-01-01
• الموضوعات: Fabrication and characterization; photonic crystals; nanocavities; nanophotonics.
• الوصول للمادة أونلاين: https://ieeexplore.ieee.org/document/8046146/
• تدمد: 1943-0655

We design and fabricate a high <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula> silica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic modes in the 1.55&#x00A0; <inline-formula><tex-math notation="LaTeX">$\mathrm{\mu }$</tex-math></inline-formula>m wavelength range. The <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula> values obtained for both modes exceed <inline-formula><tex-math notation="LaTeX">$10^4$</tex-math></inline-formula> and are the highest reported values for photonic crystal (PhC) nanocavities made of silica. We also investigate the optimum conditions for coupling with the cavity in a side-coupled configuration. We achieve a coupling efficiency of 87&#x0025; with the TE mode while maintaining a loaded <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula> of more than <inline-formula><tex-math notation="LaTeX">$10^4$</tex-math></inline-formula>. We also found that the presence of a coupled waveguide reduces the intrinsic <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula> of the cavity, depending on the gap distance. This provides useful quantitative information for establishing an efficient scheme for coupling with low-index PhC nanocavities.