A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode

Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, ant...

書誌詳細
出版年:	Micromachines
主要な著者:	Bo Jiang, Yan Su, Guowen Liu, Lemin Zhang, Fumin Liu
フォーマット:	論文
言語:	英語
出版事項:	MDPI AG 2020-12-01
主題:	MEMS device gyroscope outer-frame-anchor high-quality factor
オンライン･アクセス:	https://www.mdpi.com/2072-666X/11/12/1071

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