On-Chip Modification of Titanium Electrothermal Characteristics by Joule Heating: Application to Terahertz Microbolometer

This study demonstrates the conversion of metallic titanium (Ti) to titanium oxide just by conducting electrical current through Ti thin film in vacuum and increasing the temperature by Joule heating. This led to the improvement of electrical and thermal properties of a microbolometer. A microbolome...

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التفاصيل البيبلوغرافية

الحاوية / القاعدة:	Nanomaterials
المؤلفون الرئيسيون:	Durgadevi Elamaran, Ko Akiba, Hiroaki Satoh, Amit Banerjee, Norihisa Hiromoto, Hiroshi Inokawa
التنسيق:	مقال
اللغة:	الإنجليزية
منشور في:	MDPI AG 2024-01-01
الموضوعات:	titanium titanium oxide Joule heating temperature coefficient of resistance (TCR) microbolometer responsivity
الوصول للمادة أونلاين:	https://www.mdpi.com/2079-4991/14/2/225