Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing

Imaging scatterometry is a method for determining the reflection distribution based on bidirectional reflectance distribution function (BRDF) measurements. However, it has a well-known limitation that results obtained by imaging scatterometry for small illumination angles are practically useless. Th...

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Bibliographic Details
Published in:	Sensors
Main Authors:	Adrian Zakrzewski, Piotr Jurewicz, Michał Ćwikła, Piotr Koruba, Jacek Reiner
Format:	Article
Language:	English
Published:	MDPI AG 2020-12-01
Subjects:	imaging scatterometry BRDF reconstruction reflection distribution
Online Access:	https://www.mdpi.com/1424-8220/21/1/8

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