Energy-Dispersive X-Ray Microanalysis – as a Method for Study the Aluminium-Polysilicon Interface after Exposure with Long-Term and Rapid Thermal Annealing

Energy dispersive X-ray microanalysis is one of the main methods for determining the elemental composition of matter. Possessing high locality and a relatively shallow penetration depth of the electron beam (< 1 μm), this method has found wide application in the field of microelectronics, as...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:	Приборы и методы измерений
المؤلفون الرئيسيون:	U. A. Pilipenko, N. S. Kovalchuk, D. V. Shestovski, D. V. Zhyhulin
التنسيق:	مقال
اللغة:	الإنجليزية
منشور في:	Belarusian National Technical University 2024-07-01
الموضوعات:	ohmic contact integrated circuit aluminum-polysilicon interface rapid thermal processing
الوصول للمادة أونلاين:	https://pimi.bntu.by/jour/article/view/870

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