Development of a Sinusoidal Corrugated Dual-Axial Flexure Mechanism for Planar Nanopositioning

• 發表在: Actuators
• Main Authors: Yuhan Niu, Xingyou Chen, Li Chen, Zhiwei Zhu, Peng Huang
• 格式: Article
• 語言: 英语
• 出版: MDPI AG 2022-09-01
• 主題: dual-axial nanopositioning; corrugated flexure hinge; system modeling; trajectory tracking
• 在線閱讀: https://www.mdpi.com/2076-0825/11/10/276

Taking advantage of the concurrent stretching and bending property of corrugated flexure hinges, a sinusoidal corrugated flexure linkage was proposed and applied for the construction of a corrugated dual-axial mechanism with structural symmetry and decoupled planar motion guidance. Castigliano’s second theorem was employed to derive the complete compliance for a basic sinusoidal corrugated flexure unit, and matrix-based compliance modeling was then applied to find the stiffness of the sinusoidal corrugated flexure linkage and the corrugated dual-axial mechanism. Using established analytical models, the influence of structural parameters on the stiffness of both the corrugated flexure linkage and the dual-axial mechanism were investigated, with further verification by finite element analysis, with errors less than 20% compared to the analytical results for all cases. In addition, the stiffness of the corrugated flexure mechanism was practically tested, and its deviation between practical and analytical was around 7.4%. Further, the feasibility of the mechanism was demonstrated by successfully applying it for a magnetic planar nanopositioning stage, for which both open-loop and closed-loop performances were systematically examined. The stage has a stroke around 130 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m for the two axes and a maximum cross-talk less than 2.5%, and the natural frequency is around 590 Hz.