Wafer-Scale Epitaxial Low Density InAs/GaAs Quantum Dot for Single Photon Emitter in Three-Inch Substrate

In this work, we successfully achieved wafer-scale low density InAs/GaAs quantum dots (QDs) for single photon emitter on three-inch wafer by precisely controlling the growth parameters. The highly uniform InAs/GaAs QDs show low density of <inline-formula>μ<math xmlns="http://www.w3.org...

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Bibliographic Details
Published in:	Nanomaterials
Main Authors:	Xiaoying Huang, Rongbin Su, Jiawei Yang, Mujie Rao, Jin Liu, Ying Yu, Siyuan Yu
Format:	Article
Language:	English
Published:	MDPI AG 2021-04-01
Subjects:	three-inch wafer-scale low density QD CBR-HBR
Online Access:	https://www.mdpi.com/2079-4991/11/4/930

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