Tantalum airbridges for scalable superconducting quantum processors

Abstract The unique property of tantalum, particularly its exceptional resistance to both acid and alkali, makes it promising for superconducting quantum processors. Here, we propose a novel lift-off method for fabricating tantalum airbridges with separate or fully-capped structures. This method int...

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Bibliographic Details
Published in:	npj Quantum Information
Main Authors:	Kunliang Bu, Sainan Huai, Zhenxing Zhang, Dengfeng Li, Yuan Li, Jingjing Hu, Xiaopei Yang, Maochun Dai, Tianqi Cai, Yi-Cong Zheng, Shengyu Zhang
Format:	Article
Language:	English
Published:	Nature Portfolio 2025-01-01
Online Access:	https://doi.org/10.1038/s41534-025-00972-8

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