| 要約: | This study proposes a high-frequency pneumatic system and demodulation method based on polydimethylsiloxane (PDMS) film-embedded fiber-optic Fabry-Perot sensor to meet the conflicting requirements of small sizes and wide frequency-response range not achieved by conventional pneumatic probes. The high modulus of elasticity of PDMS films provides the potential for an upper limit of a pneumatic frequency response up to 20 kHz, and the new demodulation algorithm, based on the ability of the F-P cavity to return to its initial length from the maximum cavity length change, is utilized to analyze its variation. The process of recovering F-P cavity corresponds with the sparse part of the signal, which takes advantage of the unique characteristics of interference fringes in this part. Moreover, the relationship between the relative change of the F-P cavity length and pneumatic pressure, as well as the relationship between the duration of the relative change of the F-P cavity length and the frequency are analyzed comprehensively. The rationality of the proposed demodulation scheme is verified from the angle-error analyses. These analyses could be helpful for integrated and high-frequency response pneumatic detection.
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