The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring

An omnidirectional inertial switch with rectangular spring is proposed in this paper, and the prototype has been fabricated by surface micromachining technology. To evaluate the threshold consistency and stability of omnidirectional inertia switch, the stiffness of rectangular suspension springs is...

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Bibliographic Details
Published in:	Micromachines
Main Authors:	Wenguo Chen, Rui Wang, Huiying Wang, Shulei Sun
Format:	Article
Language:	English
Published:	MDPI AG 2021-04-01
Subjects:	MEMS inertial micro-switch surface micromachining contact time rectangular suspension spring
Online Access:	https://www.mdpi.com/2072-666X/12/4/440

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