Direct Deposition of CVD Diamond Layers on Top of GaN Membranes
We present technological issues in the deposition of diamond films on gallium nitride (GaN) membranes. Many wrinkles and thicker diamond layers were observed at the membrane center and poor quality diamond outside the membrane area. The deflection of the membranes was analyzed by a bulging method us...
| 出版年: | Proceedings |
|---|---|
| 主要な著者: | , , , , , , , , |
| フォーマット: | 論文 |
| 言語: | 英語 |
| 出版事項: |
MDPI AG
2020-12-01
|
| 主題: | |
| オンライン･アクセス: | https://www.mdpi.com/2504-3900/56/1/35 |
| _version_ | 1850346508964069376 |
|---|---|
| author | Tibor Izsák Gabriel Vanko Milan Držík Stephan Kasemann Johann Zehetner Marian Vojs Bohumír Zaťko Štěpán Potocký Alexander Kromka |
| author_facet | Tibor Izsák Gabriel Vanko Milan Držík Stephan Kasemann Johann Zehetner Marian Vojs Bohumír Zaťko Štěpán Potocký Alexander Kromka |
| author_sort | Tibor Izsák |
| collection | DOAJ |
| container_title | Proceedings |
| description | We present technological issues in the deposition of diamond films on gallium nitride (GaN) membranes. Many wrinkles and thicker diamond layers were observed at the membrane center and poor quality diamond outside the membrane area. The deflection of the membranes was analyzed by a bulging method using white light interferometry. The membrane bending is discussed in the terms of temperature gradient and mismatch of thermal expansion coefficients of materials. |
| format | Article |
| id | doaj-art-aa7a3d3dbbbb4a1d952e89e56a5a896c |
| institution | Directory of Open Access Journals |
| issn | 2504-3900 |
| language | English |
| publishDate | 2020-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| spelling | doaj-art-aa7a3d3dbbbb4a1d952e89e56a5a896c2025-08-19T23:11:55ZengMDPI AGProceedings2504-39002020-12-015613510.3390/proceedings2020056035Direct Deposition of CVD Diamond Layers on Top of GaN MembranesTibor Izsák0Gabriel Vanko1Milan Držík2Stephan Kasemann3Johann Zehetner4Marian Vojs5Bohumír Zaťko6Štěpán Potocký7Alexander Kromka8Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská Cesta 9, 841 04 Bratislava, SlovakiaInstitute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská Cesta 9, 841 04 Bratislava, SlovakiaInternational Laser Centre, Ilkovičova 3, 841 04 Bratislava, SlovakiaResearch Center for Microtechnology, Voralberg University of Applied Sciences, Hochschulstraße 1, 6850 Dornbirn, AustriaResearch Center for Microtechnology, Voralberg University of Applied Sciences, Hochschulstraße 1, 6850 Dornbirn, AustriaInstitute of Electronics and Photonics, Slovak University of Technology, 841 04 Bratislava, SlovakiaInstitute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská Cesta 9, 841 04 Bratislava, SlovakiaInstitute of Physics, Czech Academy of Sciences, Cukrovarnická 10, 162 00 Prague, Czech RepublicInstitute of Physics, Czech Academy of Sciences, Cukrovarnická 10, 162 00 Prague, Czech RepublicWe present technological issues in the deposition of diamond films on gallium nitride (GaN) membranes. Many wrinkles and thicker diamond layers were observed at the membrane center and poor quality diamond outside the membrane area. The deflection of the membranes was analyzed by a bulging method using white light interferometry. The membrane bending is discussed in the terms of temperature gradient and mismatch of thermal expansion coefficients of materials.https://www.mdpi.com/2504-3900/56/1/35GaNdiamondCVDMEMSintrinsic stress |
| spellingShingle | Tibor Izsák Gabriel Vanko Milan Držík Stephan Kasemann Johann Zehetner Marian Vojs Bohumír Zaťko Štěpán Potocký Alexander Kromka Direct Deposition of CVD Diamond Layers on Top of GaN Membranes GaN diamond CVD MEMS intrinsic stress |
| title | Direct Deposition of CVD Diamond Layers on Top of GaN Membranes |
| title_full | Direct Deposition of CVD Diamond Layers on Top of GaN Membranes |
| title_fullStr | Direct Deposition of CVD Diamond Layers on Top of GaN Membranes |
| title_full_unstemmed | Direct Deposition of CVD Diamond Layers on Top of GaN Membranes |
| title_short | Direct Deposition of CVD Diamond Layers on Top of GaN Membranes |
| title_sort | direct deposition of cvd diamond layers on top of gan membranes |
| topic | GaN diamond CVD MEMS intrinsic stress |
| url | https://www.mdpi.com/2504-3900/56/1/35 |
| work_keys_str_mv | AT tiborizsak directdepositionofcvddiamondlayersontopofganmembranes AT gabrielvanko directdepositionofcvddiamondlayersontopofganmembranes AT milandrzik directdepositionofcvddiamondlayersontopofganmembranes AT stephankasemann directdepositionofcvddiamondlayersontopofganmembranes AT johannzehetner directdepositionofcvddiamondlayersontopofganmembranes AT marianvojs directdepositionofcvddiamondlayersontopofganmembranes AT bohumirzatko directdepositionofcvddiamondlayersontopofganmembranes AT stepanpotocky directdepositionofcvddiamondlayersontopofganmembranes AT alexanderkromka directdepositionofcvddiamondlayersontopofganmembranes |