Molecular beam epitaxy growth of IrO2 using plasma-only oxidation
Growth of IrO2 films via molecular beam epitaxy (MBE) using an oxygen plasma as the sole oxidant is demonstrated for the first time. We investigate the oxidizing conditions required for IrO2 by characterizing the species present in the plasma using optical emission spectroscopy and comparing the the...
| Published in: | APL Materials |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-09-01
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| Online Access: | http://dx.doi.org/10.1063/5.0282709 |