APA (7th ed.) Citation

Schuegraf, K., Abraham, M. C., Brand, A., Naik, M., & Thakur, R. (2013, January). Semiconductor Logic Technology Innovation to Achieve Sub-10 nm Manufacturing. IEEE Journal of the Electron Devices Society.

Chicago Style (17th ed.) Citation

Schuegraf, Klaus, Mathew C. Abraham, Adam Brand, Mehul Naik, and Randhir Thakur. "Semiconductor Logic Technology Innovation to Achieve Sub-10 Nm Manufacturing." IEEE Journal of the Electron Devices Society Jan. 2013.

MLA (9th ed.) Citation

Schuegraf, Klaus, et al. "Semiconductor Logic Technology Innovation to Achieve Sub-10 Nm Manufacturing." IEEE Journal of the Electron Devices Society, Jan. 2013.