Thin Film Encapsulation for RF MEMS in 5G and Modern Telecommunication Systems

In this work, SiN<sub>x</sub>/a-Si/SiN<sub>x</sub> caps on conductive coplanar waveguides (CPWs) are proposed for thin film encapsulation of radio-frequency microelectromechanical systems (RF MEMS), in view of the application of these devices in fifth generation (5G) and mode...

Full description

Bibliographic Details
Published in:	Sensors
Main Authors:	Anna Persano, Fabio Quaranta, Antonietta Taurino, Pietro Aleardo Siciliano, Jacopo Iannacci
Format:	Article
Language:	English
Published:	MDPI AG 2020-04-01
Subjects:	5G RF MEMS thin film encapsulation silicon nitride oxygen plasma etching
Online Access:	https://www.mdpi.com/1424-8220/20/7/2133

Similar Items

Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches
by: Anna Persano, et al.
Published: (2024-04-01)

A New Concept of Reconfigurable Antenna Structure Based on an Array of RF-MEMS Switches
by: Massimo Donelli, et al.
Published: (2024-11-01)

RF-MEMS Monolithic K and Ka Band Multi-State Phase Shifters as Building Blocks for 5G and Internet of Things (IoT) Applications
by: Jacopo Iannacci, et al.
Published: (2020-05-01)

The Seven-State RF MEMS Miniaturized Broadband Reconfigurable Step Attenuator
by: Yuheng Si, et al.
Published: (2024-09-01)

Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End Modules
by: Alexey Tkachenko, et al.
Published: (2023-02-01)

Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications
by: Jasmina Casals-Terré, et al.
Published: (2022-11-01)

Recent Advances in Flexible RF MEMS
by: Yingli Shi, et al.
Published: (2022-07-01)

Comprehensive Review of RF MEMS Switches in Satellite Communications
by: Bingqian Shao, et al.
Published: (2024-05-01)

Simulation study on impact characteristics of RF microsystem based on bulk silicon MEMS process
by: Feng Zhengsen, et al.
Published: (2024-02-01)

A Reconfigurable Pseudohairpin Filter Based on MEMS Switches
by: Massimo Donelli, et al.
Published: (2022-12-01)

RF Magnetron Sputtering of Silicon Carbide and Silicon Nitride Films for Solar Cells
by: V.S. Zakhvalinskii, et al.
Published: (2014-07-01)

Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology
by: Flavio Giacomozzi, et al.
Published: (2023-01-01)

MEMS Valves with Molecular Flow Regime Orifices
by: Alvise Bagolini, et al.
Published: (2024-03-01)

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G Scenario—Part 1
by: Girolamo Tagliapietra, et al.
Published: (2024-04-01)

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G Scenario—Part 2
by: Girolamo Tagliapietra, et al.
Published: (2024-07-01)

Optimum Electromagnetic Modelling of RF MEMS Switches
by: Mehadi Hasan Ziko, et al.
Published: (2018-10-01)

Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars
by: Hongbo Feng, et al.
Published: (2022-11-01)

MEMS Membranes with Nanoscale Holes for Analytical Applications
by: Alvise Bagolini, et al.
Published: (2021-01-01)

Design and Fabrication of Double-Layer Crossed Si Microchannel Structure
by: Yipeng Wang, et al.
Published: (2021-12-01)

Curvature-Modulated Si Spherical Cap-Like Structure Fabricated by Multistep Ring Edge Etching
by: Tieying Ma, et al.
Published: (2020-08-01)

Implementation of Highly Reliable Contacts for RF MEMS Switches
by: Lili Jiang, et al.
Published: (2024-01-01)

In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS
by: Kristina Bespalova, et al.
Published: (2023-08-01)

Effect of Substrate-RF on Sub-200 nm Al<sub>0.7</sub>Sc<sub>0.3</sub>N Thin Films
by: Michele Pirro, et al.
Published: (2022-05-01)

Design and Preparation of Compact 3-Bit Reconfigurable RF MEMS Attenuators for Millimeter-Wave Bands
by: Shilong Miao, et al.
Published: (2025-09-01)

A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy
by: Zhongxuan Hou, et al.
Published: (2023-05-01)

Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors
by: Marco Baù, et al.
Published: (2020-06-01)

Load-Deflection Behavior of RF-MEMS Switches: FEA and Analytical Modeling for Prediction of Mechanical Properties
by: Chiara De Pascali, et al.
Published: (2018-11-01)

Design and Analysis of a Fluid-Filled RF MEMS Switch
by: Hongyu Zhu, et al.
Published: (2023-03-01)

MEMS-Switched Triangular and U-Shaped Band-Stop Resonators for K-Band Operation
by: Romolo Marcelli, et al.
Published: (2023-10-01)

Study on SR-Crossbar RF MEMS Switch Matrix Port Configuration Scheme with Optimized Consistency
by: Weiwei Zhou, et al.
Published: (2024-05-01)

Superconducting Tunable Microstrip Gap Resonators Using Low Stress RF MEMS Fabrication Process
by: Robert R. Benoit, et al.
Published: (2017-01-01)

Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems
by: Makoto Ishida, et al.
Published: (2007-07-01)

The Fringe-Capacitance of Etching Holes for CMOS-MEMS
by: Yi-Ta Wang, et al.
Published: (2015-10-01)

Influence of the deposition process parameters on electronic properties of BN films obtained by means of RF PACVD
by: Piotr Firek, et al.
Published: (2023-06-01)

A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
by: Rafel Perelló-Roig, et al.
Published: (2021-01-01)

Resonator Width Optimization for Enhanced Performance and Bonding Reliability in Wideband RF MEMS Filter
by: Gwanil Jeon, et al.
Published: (2025-07-01)

Characterization of the dynamics of encapsulated silicon MEMS devices using low-coherence heterodyne LDV technology
by: Marco Wolfer, et al.
Published: (2023-06-01)

A micro level electrostatically actuated cantilever and metal contact based series RF MEMS switch for multi-band applications
by: T. Lakshmi Narayana, et al.
Published: (2017-01-01)

Temperature Effects in Packaged RF MEMS Switches with Optimized Gold Electroplating Process
by: Lifeng Wang, et al.
Published: (2024-08-01)

The Design, Simulation, and Parametric Optimization of an RF MEMS Variable Capacitor with an S-Shaped Beam
by: Shakila Shaheen, et al.
Published: (2024-08-01)