Research on the Evolution of Defects Initiation and the Diffusion of Dopant on the Si/SiO2 Interface

Abstract Si/SiO2 interfaces, important parts of Si‐based devices, significantly influence the performance of Si‐based devices. However, owing to the impact of the external environment, related defects are generated, and the dopant can diffuse and redistribute, causing a series of parasitic effects t...

Full description

Bibliographic Details
Published in:	Advanced Materials Interfaces
Main Authors:	Yunqi Yang, Dongdong Chen, Di Li, Tianlong Zhao, Weida Zhang, Wen Qiao, Yingjie Liang, Yintang Yang
Format:	Article
Language:	English
Published:	Wiley-VCH 2025-04-01
Subjects:	defects initiation defect modeling dopant diffusion Si/SiO2 interface
Online Access:	https://doi.org/10.1002/admi.202400751

Similar Items

SiO2/Si interface oxidation and defects in O2 plasma processing
by: Shota Nunomura, et al.
Published: (2025-01-01)

First-Principles Study on the Impact of Stress on Depassivation of Defects at a-SiO2/Si Interfaces
by: Xin Liu, et al.
Published: (2022-05-01)

Defect Engineering and Dopant Properties of MgSiO<sub>3</sub>
by: Kowthaman Pathmanathan, et al.
Published: (2025-03-01)

Recovery of plasma-induced defects in SiO2/Si stack: defect activation and hydrogen’s effects
by: Shota Nunomura, et al.
Published: (2025-01-01)

Investigating the mechanism of SiO2/4H-SiC interface traps passivation by boron incorporation through FT-IR analysis of near-interface SiO2
by: Runze Wang, et al.
Published: (2024-01-01)

Comparison of interfaces, band alignments, and tunneling currents between crystalline and amorphous silica in Si/SiO2/Si structures
by: Eunjung Ko, et al.
Published: (2022-01-01)

Generation of single photon emitters at a SiO2/SiC interface by high-temperature oxidation and reoxidation at lower temperatures
by: Kentaro Onishi, et al.
Published: (2024-01-01)

DFT Modelling of Li<sub>6</sub>SiO<sub>4</sub>Cl<sub>2</sub> Electrolyte Material for Li-Ion Batteries
by: Navaratnarajah Kuganathan
Published: (2022-09-01)

Defect Inspection Techniques in SiC
by: Po-Chih Chen, et al.
Published: (2022-03-01)

The Synthesis and Characterization of CdS Nanostructures Using a SiO<sub>2</sub>/Si Ion-Track Template
by: Aiman Akylbekova, et al.
Published: (2024-12-01)

Ellipsometric spectroscopy studies of compaction and decompaction of Si-SiO2 systems
by: Witold Rzodkiewicz, et al.
Published: (2023-06-01)

Fabrication of SiO2-based microcantilevers by anisotropic chemical etching of (100) single crystal Si
by: VESNA JOVIC, et al.
Published: (2007-11-01)

Direct Synthesis of Graphene Dendrites on SiO2/Si Substrates by Chemical Vapor Deposition
by: Yingxian Li, et al.
Published: (2020-01-01)

Sustainable photocatalyst fabrication from Silau River-derived SiO2: PVA/TiO2/SiO2 for water purification
by: Moraida Hasanah, et al.
Published: (2025-06-01)

Negative resistance, capacitance in Mn/SiO2/p-Si MOS structure
by: A Ashery, et al.
Published: (2020-01-01)

Computational Study of Crystallography, Defects, Ion Migration and Dopants in Almandine Garnet
by: Janya Lumbini Subasinghe, et al.
Published: (2022-03-01)

Structural studies on the interaction of nano-SiO2 with lysozyme
by: B. Shareghi, et al.
Published: (2011-07-01)

Reduction of Interface State Density in 4H-SiC MOS Capacitors Modified by ALD-Deposited Interlayers
by: Zhenyu Wang, et al.
Published: (2025-04-01)

Correlation studies of thermoluminescence and electron paramagnetic resonance in Cr3+-doped CaSiO3 phosphor for dosimetric purposes
by: Edy E. Cuevas-Arizaca, et al.
Published: (2025-12-01)

Unraveling the Fundamental Mechanism of Interface Conductive Network Influence on the Fast-Charging Performance of SiO-Based Anode for Lithium-Ion Batteries
by: Ruirui Zhang, et al.
Published: (2023-12-01)

Fracture behavior of SiCf/SiC cladding with prefabricated cracks on the inner/outer wall
by: Ze-Xi Zhang, et al.
Published: (2024-11-01)

Study of SiO2/Al2O3 and CaO/SiO2 relationships in alkali-activated cements
by: Andreza Frare, et al.
Published: (2024-10-01)

Numerical prediction of surface morphology and roughness in rotary ultrasonic face grinding SiO2f/SiO2 composite
by: Longxu Yao, et al.
Published: (2023-07-01)

Monolithically Integrated GaAs Nanoislands on CMOS-Compatible Si Nanotips Using GS-MBE
by: Adriana Rodrigues, et al.
Published: (2025-07-01)

Preparation of SiO2 coated carbon fibers and its interfacial properties with cement paste matrix
by: Yanan Geng, et al.
Published: (2023-03-01)

Studies on the Interfacial Effect between Nano-SiO2 and Nylon 6 in Nylon 6/SiO2 Nanocomposites
by: Qi-Jie Xu, et al.
Published: (2016-04-01)

Study of Surface Defect Detection Techniques in Grinding of SiCp/Al Composites
by: Haotao Wang, et al.
Published: (2023-11-01)

Temperature dependent optical constants for SiO2 film on Si substrate by ellipsometry
by: Junbo Gong, et al.
Published: (2017-01-01)

Mechanical and fracture property optimization of graphene-SiO2-reinforced epoxy-PLA nanocomposites for biomedical applications
by: Vikram Kedambadi Vasu, et al.
Published: (2025-01-01)

Analysis of Mechanical Properties and Microstructure of Nano- and Micro-SiO2 Materials as Cementitious Composite Binder
by: Won-Woo Kim, et al.
Published: (2023-11-01)

Impact of crystalline defects in 4H-SiC epitaxial layers on the electrical characteristics and blocking capability of SiC power devices
by: E Kodolitsch, et al.
Published: (2022-01-01)

Sintering of Ore Mixes Containing Iron Concentrates of a Low SiO2 Concentration of Below 1,0 %
by: Budzik, R., et al.
Published: (2007-01-01)

Vacancy Defect Reconstruction and its Effect on Electron Transport in Si-C Nanotubes
by: S. Choudhary, et al.
Published: (2011-01-01)

Defects and Dopants in CaFeSi<sub>2</sub>O<sub>6</sub>: Classical and DFT Simulations
by: Navaratnarajah Kuganathan, et al.
Published: (2020-03-01)

Optical properties of SiO2 opal crystals decorated with silver nanoparticles
by: Nguyen Duy Thien, et al.
Published: (2024-12-01)

SiO2 particles effect on the mechanical properties of the starch/PVA blends
by: Nahida J. H.
Published: (2018-10-01)

Insight on defects mechanically introduced by nanoindentation in 4H-SiC p-n diode
by: Antonella Sciuto, et al.
Published: (2024-03-01)

Effects of 5 MeV Proton Irradiation on Nitrided SiO<sub>2</sub>/4H-SiC MOS Capacitors and the Related Mechanisms
by: Dongxun Li, et al.
Published: (2020-07-01)

Spectroscopic Properties of Si-nc in SiO<sub>x</sub> Films Using HFCVD
by: Zaira Jocelyn Hernández Simón, et al.
Published: (2020-07-01)

Multifunctional SiC@SiO2 Nanofiber Aerogel with Ultrabroadband Electromagnetic Wave Absorption
by: Limeng Song, et al.
Published: (2022-07-01)