Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy
Digital holographic microscopy is an important measurement method for micro-nano structures. However, when the structured features are of high-slopes, the interference fringes can become too dense to be recognized. Due to the Nyquist’s sampling limit, reliable wavefront restoration and phase unwrapp...
| Published in: | Sensors |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-11-01
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| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/23/9526 |
| _version_ | 1851074302487560192 |
|---|---|
| author | Xinyang Ma Rui Xiong Wei Wang Xiangchao Zhang |
| author_facet | Xinyang Ma Rui Xiong Wei Wang Xiangchao Zhang |
| author_sort | Xinyang Ma |
| collection | DOAJ |
| container_title | Sensors |
| description | Digital holographic microscopy is an important measurement method for micro-nano structures. However, when the structured features are of high-slopes, the interference fringes can become too dense to be recognized. Due to the Nyquist’s sampling limit, reliable wavefront restoration and phase unwrapping are not feasible. To address this problem, the interference fringes are proposed to be sparsified by tilting the reference wavefronts. A data fusion strategy including region extraction and tilt correction is developed for reconstructing the full-area surface topographies. Experimental results of high-slope elements demonstrate the validity and reliability of the proposed method. |
| format | Article |
| id | doaj-art-e08cc724fe184d8ea9a2fd5077c6895e |
| institution | Directory of Open Access Journals |
| issn | 1424-8220 |
| language | English |
| publishDate | 2023-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| spelling | doaj-art-e08cc724fe184d8ea9a2fd5077c6895e2025-08-19T22:34:05ZengMDPI AGSensors1424-82202023-11-012323952610.3390/s23239526Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic MicroscopyXinyang Ma0Rui Xiong1Wei Wang2Xiangchao Zhang3Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, ChinaShanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, ChinaShanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, ChinaShanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, ChinaDigital holographic microscopy is an important measurement method for micro-nano structures. However, when the structured features are of high-slopes, the interference fringes can become too dense to be recognized. Due to the Nyquist’s sampling limit, reliable wavefront restoration and phase unwrapping are not feasible. To address this problem, the interference fringes are proposed to be sparsified by tilting the reference wavefronts. A data fusion strategy including region extraction and tilt correction is developed for reconstructing the full-area surface topographies. Experimental results of high-slope elements demonstrate the validity and reliability of the proposed method.https://www.mdpi.com/1424-8220/23/23/9526optical measurementdigital holographic microscopyhigh-slope structuredata fusion |
| spellingShingle | Xinyang Ma Rui Xiong Wei Wang Xiangchao Zhang Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy optical measurement digital holographic microscopy high-slope structure data fusion |
| title | Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy |
| title_full | Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy |
| title_fullStr | Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy |
| title_full_unstemmed | Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy |
| title_short | Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy |
| title_sort | flexible measurement of high slope micro nano structures with tilted wave digital holographic microscopy |
| topic | optical measurement digital holographic microscopy high-slope structure data fusion |
| url | https://www.mdpi.com/1424-8220/23/23/9526 |
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