Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy

Digital holographic microscopy is an important measurement method for micro-nano structures. However, when the structured features are of high-slopes, the interference fringes can become too dense to be recognized. Due to the Nyquist’s sampling limit, reliable wavefront restoration and phase unwrapp...

Full description

Bibliographic Details

Published in:	Sensors
Main Authors:	Xinyang Ma, Rui Xiong, Wei Wang, Xiangchao Zhang
Format:	Article
Language:	English
Published:	MDPI AG 2023-11-01
Subjects:	optical measurement digital holographic microscopy high-slope structure data fusion
Online Access:	https://www.mdpi.com/1424-8220/23/23/9526