PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates

A bottom-up fabrication approach for flexible piezoelectric micromachined ultrasound transducer (PMUT) arrays on stainless-steel substrates was developed. Devices were fabricated using chemical solution deposition of a 700 nm-thick layer of Pb<sub>0.99</sub>□<sub>0.01</sub>(Z...

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Bibliographic Details
Published in:	Sensors
Main Authors:	Kae Nakamura, Chi-Luen Huang, Ali Habib Akhyari, Andrea P. Argüelles, Thomas N. Jackson, Susan Trolier-McKinstry
Format:	Article
Language:	English
Published:	MDPI AG 2026-04-01
Subjects:	flexible MEMS PMUT PZT metal foil
Online Access:	https://www.mdpi.com/1424-8220/26/7/2246

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