Modulation of Oxygen Content and Ferroelectricity in Sputtered Hafnia‐Zirconia by Engineering of Tungsten Oxide Bottom Electrodes

Abstract The well‐developed high‐k technologies ease the integration complexity for HfO2‐based ferroelectric (FE) devices in the complementary metal‐oxide semiconductor processes. Sputtered HfxZr(1‐x)O2 (HZO) FEs have proven their thermal compatibility in back‐end‐of‐line (BEOL) integration processe...

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Bibliographic Details
Published in:	Advanced Electronic Materials
Main Authors:	Xuetao Wang, Stefan Slesazeck, Thomas Mikolajick, Matthias Grube
Format:	Article
Language:	English
Published:	Wiley-VCH 2024-06-01
Subjects:	back end of line ferroelectrics hafnium zirconium oxide oxygen vacancy sputtering tungsten oxide
Online Access:	https://doi.org/10.1002/aelm.202300798

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